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AIS™ ACTIVE ISOLATION SYSTEM

Active electronic-pneumatic vibration isolation with 3 or 6 degrees of freedom.

The modular system operates without disturbing heat generation, magnetic field fluctuations or high power consumption.

General PRODUCT DESCRIPTION

 

  • With the AIS™ Active isolation System, active control significantly improves vibration isolation by suppressing amplification at resonance without degrading properties at higher frequencies. In this process, the AIS™ maintains its active properties over the entire working travel (stroke) of the air spring.
  • In dynamic applications, the active response of the system ensures reduced deflection times after excitation. The system is consequently quicker at rest and in measuring tasks with positioning movements achieves shorter cycle times than passive systems.
  • The special feature of the system is the pneumatic actuator principle, which hoods a wide dynamic working range – even in the case of very heavy machines. Control bandwidths up to the 300 Hz range are possible due to extremely fast-reacting valves. The system reacts in real time and consequently so quickly that no feed-forward signal control is necessary.
  • The AIS™ can be used with three or six actively controlled degrees of freedom (DOF). The system can be adapted to the different application requirements. Three vertically aligned controllers are used with three regulated degrees of freedom, which actively regulate the vertical position and the rotations around both horizontal axes. The other degrees of freedom are passively reset by the membranes.
  • With the use of 6 controlled degrees of freedom, the HAB horizontal air springs are also used. In this configuration, six controllers are arranged both vertically and horizontally.
  • AIS™ High Performance. Additional BiAir air springs rotated by 90° are used in the AIS™ High Performance version to generate higher horizontal counter forces. The horizontal HAB air springs act purely as air bearings. This eliminates even minor friction effects and influences of the membrane.

TECHNICAL DATA

SYSTEM INSTALLATION AIS™

System installation Active Vibration isolation AIS™ (schematic representation)

Arrangement of the controllers for a 6 DOF AIS™

Properties

  • Active electronic-pneumatic vibration isolation with up to 6 controlled degrees of freedom.
  • Can also be retrofitted from 3 to 6 DOF using spacers.
  • Highly effective vibration isolation, nearly without resonance amplification.
  • Optimal positioning precision in vertical and horizontal plane.
  • Minimal deflection and subsidence times when machine changes loads.
  • Highly effective real-time control.
  • PLC, CAN bus and one control per degree of freedom and highly dynamic proportional position control valve.
  • Each control unit has a microprocessor and integrated, high-resolution sensor technology for position, pressure and acceleration.
  • Easy-to-use, intelligent software for commissioning and diagnostics.
  • Simple digital switching between scanning mode (during sensitive machine operations) and loading mode (during machine load changes).
  • No feed-forward signal required.
  • In contrast to electro-magnetic actuators or linear motors, no generation of heat or magnetic fields which could disturb machine operation.

OVERVIEW OF TECHNICAL DATA AIS™

AISTM
3 degrees of freedom
AISTM
6 degrees of freedom
AIS ™ High Performance
6 degrees of freedom
Typical system load *800 kg 120.000 kg800 kg 120.000 kg800 kg 120.000 kg
Vertical natural frequencies *1,2-2,5 Hz1,2-2,5 Hz1,2-2,5 Hz
Horizontal natural frequencies2,2-2,8 Hz1,1 - 1,9 Hz0,8 - 1,9 Hz
Type of controlServo - pneumaticServo - pneumaticServo - pneumatic
Actively controlled frequency0-15 Hz0-15 Hz0-15 Hz
Clean room suitabilityjajaja
Communiction interfacesEthernet ,
Digital I / O , RS232
Ethernet ,
Digital I / O , RS232
Ethernet ,
Digital I / O , RS232

SENSOR RESOLUTION

Route measuring system0,2 μm0,2 μm0,2 μm
Accelerometer8 μg8 μg8 μg
Pressure sensor0,2 mbar0,2 mbar0,2 mbar
Sampling rate sensor signals4 kHz
( after oversampling )
4 kHz
( after oversampling )
4 kHz
( after oversampling )

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