AIS Platform – Active vibration Isolation System for Platform
Machine Data
Wafer Mask Inspection Tool installed on a raised floor in a Clean Room AIS – Active vibration Isolation Platform for Clean Room.
Products Used
Bilz High Performance Active vibration Isolation System – AIS
Custom designed platform.
Project Goals
Provide an AIS – Active vibration Isolation System that will fit under a raised floor in a clean room. Isolation needed to reach VC-E Floor vibration criteria.
AIS Platform – Wafer Mask Inspection Tool
Bilz USA is the leading industry expert in vibration isolation and leveling technology. Our experts can answer your questions and show you the best leveling and vibration options for your new-to-you machine.
