AIS Platform – Active vibration Isolation System for Platform
Machine Data
Wafer Mask Inspection Tool installed on a raised floor in a Clean Room AIS – Active vibration Isolation Platform for Clean Room.
Products Used
Bilz High Performance Active vibration Isolation System – AIS
Custom designed platform.
Project Goals
Provide an AIS – Active vibration Isolation System that will fit under a raised floor in a clean room. Isolation needed to reach VC-E Floor vibration criteria.
