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QED Interferometer – Active Vibration Isolation-AIS™

QED Interferometer – Active Vibration Isolation-AIS™

QED-Interferometer – AIS™




Low natural frequency membrane air springs model BiAir 1-ED-AIS with Bilz Active Isolation System-AIS™

Special Requirements:

Achieving the highest resolutions possible requires a high level of vibration isolation and the avoidance of resonance amplification in the air spring’s low frequency range.











QED-Interferrometer – AIS

Can Be Used With

  • Wafer Mask Inspection Tool
  • vibration-isolation-platform
  • Lab table with granite table top supported by Bilz Active vibration isolation
  • vibration isolated platform

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