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Active Vibration Isolation of STEM-Scanning Tunneling Electron Microscope

Active Vibration Isolation of STEM-Scanning Tunneling Electron Microscope

Mechanical-Pneumatic Level Control System with model PVM-KS.  Reset accuracy +/- 10 microns.

Vertical Air spring, low natural frequency membrane air spring, model BiAir 1-ED / HE.  Vertical natural frequency: approx. 1.5 Hz

Horizontal air bearing, model HAB 660.  Horizontal natural frequency: approx. 1.0 Hz.  Air supply for floating bearing includes 0.1 micron filter.  Horizontal bearing includes fine control for the optimal setting of the horizontal Natural frequency and damping.

Christian-Albrechts-University of Kiel.  Institute of Experimental and Applied Physics. 
Vibration isolation of a Scanning Tunneling Electron Microscope (STEM) with 3point mounting.  5th floor installation site. System weight about 600 kg.

Datenblatt-AIS-REM_Uni-Kiel(0)-1

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Datenblatt AIS-REM_Uni Kiel(0)

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