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Active Vibration Isolation System AIS™

Active Vibration Isolation System AIS™

Active Vibration Isolation System-AIS™

• Active electro-pneumatic vibration isolation providing control in up to six degrees of freedom.

• Optimal vibration isolation performance without any amplification at the resonant frequency.

• Excellent level accuracy in both the vertical and horizontal planes.

• Minimal deflection and settling time after an acceleration or deceleration of a moving mass within the machine.  Shorter settling times results in greater machine throughput.

• Very efficient real time control.

• PLC, CAN-Bus, one Controller and one High Speed electro-pneumatic servovalve for each degree of freedom.

• Each Controller consists of a microprocessor and integrated, high resolution sensors for position, air pressure and acceleration.

• Easy-to-use, intelligent WinSNI-Software for setting up and optimizing the AIS™ settings and for providing system diagnostics.

• Two different modes of operation can be selected simply using a digital I/O. For example, scanning mode (during sensitive machine operations) to loading mode (during moving mass within the machine).

• No Feedforward control signal is required.

• No disturbing heat generation, magnetic variations or high electrical power consumption as with the use of electromagnetic actuators and/or linear motors.

Range of application

Optimal vibration isolation performance for machines with high dynamic forces that are performing sensitive measurements and inspections, lithography equipment, laser machines, high resolution electron microscopes and machinery for the semiconductor industry. The AIS™ is utilized when the efficiency of isolation and the settling time of conventional air springs with electro-pneumatic leveling systems is insufficient.

AIS™ has two primary functions:

One function is to protect the precision machine from floor vibration. The other primary function is to improve the performance of the machine by minimizing structure borne vibration created by the high dynamic forces produced during an acceleration or deceleration of a moving mass within the machine. In addition, settling time is reduced which minimizes the settling time before the machine can start performing its sensitive operation.

AIS™ Design

The AIS™ consists of a PLC, CAN-Bus, 16 bit-Controllers, High Speed electropneumatic servovalves and BiAir air springs and/or HABTM horizontal air springs. A range of sizes are available for both the vertical and horizontal air springs. One 16 bit-controller and one High Speed electro-pneumatic servovalve is used for each air spring or group of air springs. The AIS™ works with a minimum of 3 groups (degrees of freedom) to a maximum of 6 groups (degrees of freedom).
The 16-bit controller can be mounted directly to the air spring itself or to the machine, in the same direction as the isolator motion. Located inside the 16 bit-controller is a microprocessor, a position sensor (resolution 0.2 μm), an acceleration sensor (resolution 8 μg) and an air pressure sensor (resolution 0.2 mbar). The signals from each of these sensors will be sampled at the rate of 4 kHz. Since each 16 bit-controller has a microprocessor with specially developed control algorithms along with a special high dynamic pneumatic servo valve, the resulting performance is a very efficient real time control and no feedforward signal is required.
The 16 bit-controllers are connected by a CAN-Bus to the PLC. The PLC can be connected to a PC by a standard RS-232 for initial setup and diagnosis. The primary function of the PLC is to manage and watch over the 16-bit controllers. In addition, the PLC has digital Inputs and Outputs. For example, Ready, Motion Complete, Inspection of Position, Pressure and Power Supply, Switch over from Scanning Mode to Loading Mode, Emergency Stop.
The PLC also provides the possibility to switch from scanning mode to loading mode by using a digital I/O. The PLC takes care of downloading all of the necessary parameters to each 16 bit-controller to achieve the two different modes. The advantage of providing two different modes is the performance of the system can be optimized for each mode. For example, during scanning mode when machine is performing sensitive operations the system should be very soft and not be very aggressive otherwise forces created by the isolation system can affect the machine performance. During loading mode, level accuracy and shortest possible settling times are the most important factors and a very stiff, fast and aggressive system will provide the best performance.

Can Be Used With

  • bilz-vibration-analysis
  • Lab table with granite table top supported by Bilz Active vibration isolation
  • Wafer Mask Inspection Tool
  • vibration isolated platform

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